ISO 14644-9 specifies the classification of cleanliness levels on solid surfaces according to particle concentration in clean rooms and related controlled environment applications. In addition to recommendations on test and measurement methods, information on surface properties is also provided.
ISO 14644-9 applies to all solid surfaces in clean rooms and related controlled environments such as walls, ceilings, floors, work environments, tools, equipment and products. Surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm.
The following issues are not considered:
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